[JWalker]

Try using a different brand of Brake fluid. Also it helps to push the piston all the way down by hand (it compresses further than the clutch pedal will allow) that way you get all the last bits of trapped air out of there. If that fails well, fork up the $40 and get a new slave from Subaru and not a centric reman.

 

[JWalker]

So you think pulling the master again and bench bleeding it by hand would help?

I never had to bench bleed it. Just keep everything installed open the bleeder (keep a line attached and receptacle or vac bleeder above the slave at the other end) and push the piston by hand until it stops. Close the bleeder. Pump the pedal. Repeat until there's no visible air in the line going to the receptacle